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Microstructural characterization of Al doped Zro2 MIM capacitor using atom probe tomography

 
: Shariq, A.; Wedderhoff, K.; Müller, J.; Teichert, S.

International Field Emission Society -IFES-:
IFES 2010, 52nd International Field Emission Symposium. Program and Abstract Book : 5-8 July 2010, Crowne plaza Coogee Beach, Sydney, Australia
Sydney, 2010
International Field Emission Symposium (IFES) <52, 2010, Sydney>
English
Abstract
Fraunhofer CNT ()
MIM capacitor; atom probe; atom probe tomography

: http://publica.fraunhofer.de/documents/N-151499.html