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Three-dimensional compositional & structural characterization of semiconducting materials with sub-Nm resoluti

 
: Shariq, A.; Wedderhoff, K.; Kleint, C.; Teichert, S.

International Field Emission Society -IFES-:
IFES 2010, 52nd International Field Emission Symposium. Program and Abstract Book : 5-8 July 2010, Crowne plaza Coogee Beach, Sydney, Australia
Sydney, 2010
International Field Emission Symposium (IFES) <52, 2010, Sydney>
English
Abstract
Fraunhofer CNT ()
atom probe; atom probe tomography; metrology

: http://publica.fraunhofer.de/documents/N-151498.html