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Traps and trapping phenomena and their implications on electrical behavior of high-k capacitor stacks

: Paskaleva, A.; Lemberger, M.; Atanassova, E.; Bauer, A.J.


Journal of vacuum science and technology B. Microelectronics and nanometer structures 29 (2011), No.1, Art. 01AA03, 10 pp.
ISSN: 0734-211X
ISSN: 1071-1023
ISSN: 2166-2746
ISSN: 2166-2754
Workshop on Dielectrics in Microelectronics (WoDiM) <16, 2010, Bratislava>
Journal Article, Conference Paper
Fraunhofer IISB ()