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Effects of oxygen and forming gas annealing on ZnO-TFTs

Poster at MRS Fall Meeting 2010, Boston
: Huang, J.; Krishna, U.R.; Lemberger, M.; Jank, M.P.M.; Polster, S.; Ryssel, H.; Frey, L.

Poster urn:nbn:de:0011-n-1513323 (179 KByte PDF)
MD5 Fingerprint: 4abc48db609a00428101b906b6262ef2
Created on: 28.1.2011

2010, 1 Folie
Materials Research Society (Fall Meeting) <2010, Boston/Mass.>
Symposium F "Low-Temperature-Processed Thin-Film Transistors" <2010, Boston/Mass.>
Poster, Electronic Publication
Fraunhofer IISB ()
annealing; ZnO-TFTs; sputtering