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Characterization of Organic Contamination during Semiconductor Manufacturing Processing Employing Near Edge X-Ray Absorption Fine Structure Spectroscopy

Abstract
 
: Müller, M.; Beckhoff, B.; Bedana, P.; Borionetti, G.; Corradi, A.; Frey, L.; Guerinoni, G.; Leibold, A.; Otto, M.; Nutsch, A.

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Abstract ()

Electrochemical Society. ECS Meeting abstracts (2009), No.2, Abstract 1978
ISSN: 1091-8213
ISSN: 2151-2043
Electrochemical Society (Meeting) <216, 2009, Vienna>
English
Abstract, Electronic Publication
Fraunhofer IISB ()

: http://publica.fraunhofer.de/documents/N-148854.html