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Characterization of Organic Contamination during Semiconductor Manufacturing Processing Employing Near Edge X-Ray Absorption Fine Structure Spectroscopy

Abstract
 
: Mueller, M.; Beckhoff, B.; Bedana, P.; Borionetti, G.; Corradi, A.; Frey, L.; Guerinoni, G.; Leibold, A.; Otto, M.; Nutsch, A.; Müller, M.; Beckhoff, B.; Bedana, P.; Borionetti, G.; Corradi, A.; Frey, L.; Guerinoni, G.; Leibold, A.; Otto, M.; Nutsch, A.

Electrochemical Society. Meeting abstracts 902 (2009), Abstract 1978
ISSN: 1091-8213
ISSN: 2151-2043
Electrochemical Society (Meeting) <216, 2009, Vienna>
English
Journal Article, Abstract
Fraunhofer IISB ()

: http://publica.fraunhofer.de/documents/N-148854.html