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Title
Vorrichtung zum Verdampfen eines Materials in einer Vakuumkammer
Date Issued
2009
Author(s)
Mattausch, G.
Weiske, D.
Morgner, H.
Metzner, C.
Rögner, F.-H.
Zeibe, R.
Patent No
102009014891
Abstract
(A1) Die Erfindung betrifft eine Vorrichtung zum Verdampfen eines Materials (104; 204) innerhalb einer Vakuumkammer (101; 201), umfassend ein Gefaess (103; 203), in welchem das Material (104; 204) verdampfbar ist, wobei zumindest ein Flaechenbereich der Aussenwandung des Gefaesses (103; 203) mit einer waermedaemmenden Schicht (107; 207; 210) bedeckt ist, wobei die waermedaemmende Schicht (107; 207) poroes ist oder/und wobei die waermedaemmende Schicht (210) mit einem Spalt (211) von der Aussenwandung des Gefaesses (203) beabstandet ist und wobei mittels einer Einrichtung (109; 209) ein Gas durch die Poren der waermedaemmenden Schicht (107; 207) oder/und durch den Spalt (211) foerderbar ist.
DE 102009014891 A1 UPAB: 20101011 NOVELTY - The apparatus (100) for evaporating a material (104) inside a vacuum chamber (101), comprises a vessel (103), in which the material is evaporatable, where a surface area of an outer wall of the vessel is covered with a porous heat-insulating layer (107), which is spaced with a gap from the outer wall of the vessel. A gas is conveyable through the pores of the heat-insulating layer and/or through the gap using a device. The heat-insulating layer comprises a bulk product such as granule and/or gravel, metal foam or graphite foam, and graphite fiber plates. DETAILED DESCRIPTION - The apparatus (100) for evaporating a material (104) inside a vacuum chamber (101), comprises a vessel (103), in which the material is evaporatable, where a surface area of an outer wall of the vessel is covered with a porous heat-insulating layer (107), which is spaced with a gap from the outer wall of the vessel. A gas is conveyable through the pores of the heat-insulating layer and/or through the gap using a device. The heat-insulating layer comprises a bulk product such as granule and/or gravel, metal foam or graphite foam, and graphite fiber plates. The closing of the gap is formed at the top edge of the vessel as a nozzle. The exit direction of the gases from the nozzle is adjustable and the shape of the rising vapor clouds is modeled. The material is evaporatable by an electron beam generating device. The apparatus has a sensor, by which a value for the temperature of the vessel or a value for the temperature of the heat-insulating layer is detectable, and an evaluation device, by which the conveying quantity of the gases is regulated in dependent of the values detected by the sensor. The vessel consists of graphite, metal, metal compound, sintering body or ceramic. The device for conveying the gases through the pores and/or through the gap is operatable with switched-on vacuum pumps that are used for generating vacuum in the vacuum chamber and with switched-off vacuum pumps. The apparatus has a further device, by which the gas is pumpable from the vacuum chamber. USE - Apparatus for evaporating a material such as tin and copper inside a vacuum chamber. ADVANTAGE - The apparatus is capable of economically and rapidly evaporating the material inside the vacuum chamber with high efficiency.
Language
de
Patenprio
DE 102009014891 A: 20090325