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Comparability of TXRF Systems at Different Laboratories

: Nutsch, A.; Beckhoff, B.; Altmann, R.; Polignano, M.; Cazzini, E.; Codegoni, D.; Borionetti, G.; Kolbe, M.; Mueller, M; Mantler, C.; Streli, C.


Kolbesen, B.O. ; Electrochemical Society -ECS-, Electronics and Photonics Division:
Analytical techniques for semiconductor materials and process characterization 6. ALTECH 2009 : Symposium on "Analytical Techniques for Semiconductor Materials and Process Characterization VI" was held at the 216th meeting of the Electrochemical Society in Vienna from October 4 to 9, 2009
Pennington, NJ: ECS, 2009 (ECS transactions 25, 3)
ISBN: 978-1-566-77740-7
ISBN: 978-1-60768-090-1
ISSN: 1938-5862
Symposium "Analytical Techniques for Semiconductor Materials and Process Characterization" (ALTECH) <6, 2009, Vienna>
Electrochemical Society (Meeting) <216, 2009, Vienna>
Conference Paper
Fraunhofer IISB ()