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Highly sensitive detection of inorganic contamination
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2009
Conference Paper
Titel
Highly sensitive detection of inorganic contamination
Author(s)
Beckhoff, B.
Nutsch, A.
Altmann, R.
Borionetti, G.
Pello, C.
Polignano, M.L.
Codegoni, D.
Grasso, S.
Cazzini, E.
Bersani, M.
Lazzeri, P.
Gennaro, S.
Kolbe, M.
Müller, M.
Kregsamer, P.
Posch, F.
Hauptwerk
Ultra clean processing of semiconductor surfaces IX, UCPSS 2008
Konferenz
International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) 2008
DOI
10.4028/www.scientific.net/SSP.145-146.101
Language
English
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Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB