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Diamond/AlN thin films for optical applications

: Knöbber, F.; Bludau, O.; Williams, O.A.; Sah, R.E.; Kirste, L.; Baeumler, M.; Leopold, S.; Pätz, D.; Nebel, C.E.; Ambacher, O.; Cimalla, V.; Lebedev, V.


Ferro, G. ; American Institute of Physics -AIP-, New York; European Materials Research Society -EMRS-; European Science Foundation -ESF-:
Wide Bandgap Cubic Semiconductors. From Growth to Devices : Proceedings of the E-MRS Symposium F, Strasbourg, France, 8 - 10 June 2010
New York, N.Y.: AIP Press, 2010 (AIP Conference Proceedings 1292)
ISBN: 978-0-7354-0847-0
ISSN: 0094-243X
Symposium F "Wide Bandgap Cubic Semiconductors - From Growth to Devices" <2010, Strasbourg>
European Materials Research Society (Spring Meeting) <2010, Strasbourg>
Conference Paper
Fraunhofer IAF ()
nanocrystalline diamond; AIN; membrane; spectroscopic ellipsometry; x-ray diffractometry

In this work we report on membranes made of nanocrystalline diamond (NCD) and AlN for the use in tunable micro-optics. For the growth of the AlN and NCD thin films, magnetron sputtering and chemical vapor deposition techniques have been used, respectively. A chemical-mechanical polishing process of NCD layers has been introduced, which is crucial for the growth of c-oriented, fiber textured AlN films. AlN layers deposited on as grown and polished nanocrystalline diamond along with free standing membranes have been compared by studying microstructure, surface morphology, piezoelectrical response as well as optical properties.