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Large stroke MOEMS actuators for optical path length modulation in miniaturized FTIR-spectrometers

 
: Sandner, T.; Drabe, C.; Schenk, H.; Kensa, A.

:

Druy, M.A. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Next-generation spectroscopic technologies II : 13 April 2009, Orlando, Florida, United States; Part of SPIE Defense, Security, and Sensing Symposium
Bellingham, WA: SPIE, 2009 (Proceedings of SPIE 7319)
ISBN: 978-0-8194-7585-5
Paper 73190H
Next-Generation Spectroscopic Technologies Conference <2, 2009, Orlando/Fla.>
English
Conference Paper
Fraunhofer IPMS ()

: http://publica.fraunhofer.de/documents/N-145862.html