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Compact High-Speed Spectrometers Based on MEMS Devices with Large Amplitude In-Plane Actuators

 
: Kenda, A.; Frank, A.; Kraft, M.; Tortschanoff, A.; Sandner, T.; Schenk, H.; Scherf, W.

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Postprint (PDF; )

Procedia chemistry. Online journal 1 (2009), No.1, pp.556-559
http://www.sciencedirect.com/science/journal/18766196
ISSN: 1876-6196
Eurosensors <23, 2009, Lausanne>
English
Conference Paper, Electronic Publication
Fraunhofer IPMS ()

Abstract
At present most spectrometers, in particular for wavelengths longer than the VIS, are comparatively large, stationary and expensive. With the advent of micro-electro-mechanical systems (MEMS), it became possible to build pocket-sized spectrometers for various spectral ranges, including the near-IR or mid-IR. These systems are highly rugged and can measure spectral changes at ms time resolution or to co-add several hundreds of scans to one spectrum achieving adequate signal-to-noise ratios. Two spectrometer systems a Czerny-Turner type scanning monochromator and a FT-IR spectrometer both based on a micromechanical scanning mirror technology with in plane electrostatic actuation are presented.

: http://publica.fraunhofer.de/documents/N-145856.html