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2002
Conference Paper
Titel
Contactless electron mobility evaluation of semi-insulating GaAs and InP wafers
Alternative
Kontaktfreie Bestimmung der Elektronenbeweglichkeit in semi-insolierende GaAs- und InP-Substrate
Abstract
An innovative procedure to evaluate the electron mobility of semi-insulating GaAs and InP wafers is presented. It is based on a capacitive contactless technique previously developed for resistivity mapping (COREMA). The measurement is consecutively performed with and without a magnetic field. The correlation with Hall data is satisfactory, whereas the agreement with calculated drift mobility is excellent. The new technique is superior to the conventional procedure in regard of cost, speed, nondestructiveness, reproducibility and lateral resolution. A system design meeting the requirements of eventual routine industrial application is described.
Author(s)