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Fully CMOS compatible capacitive differential pressure sensors with on-chip programmabilities and temperature compensation

: Trieu, H.-K.; Kordas, N.; Mokwa, W.


Institute of Electrical and Electronics Engineers -IEEE-:
IEEE Sensors 2002. Proceedings : First IEEE International Conference on Sensors, June 12 - 14, 2002, Hyatt Orlando, Orlando, Florida, U.S.A.
Piscataway, NJ: IEEE Operations Center, 2002
ISBN: 0-7803-7454-1
pp.1451-1455 : Lit.
International Conference on Sensors <1, 2002, Orlando/Fla.>
Conference Paper
Fraunhofer IMS ()
programmierbarer Chip; differential pressure sensor; capacitive sensor; on-chip programmability; temperature compensation; Differenzdruckmessung; Temperaturkompensation; kapazitiver Drucksensor

This paper describes the development and characterization of CMOS compatible surface micromachined capacitive differential pressure sensors with monolithic integrated electronics. Results from on-chip linearization, temperature compensation and investigation of humidity influence are presented.