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Development of a powerful tool for nanostructuring and multiphoton imaging with nanojoule femtosecond laser pulses

: Bruneel, D.; Schwarz, M.; Audouard, E.; König, K.; Harzic, R. le


Meunier, M.:
Laser applications in microelectronic and optoelectronic manufacturing VII. Proceedings : 26 - 29 January 2009, San Jose, California, United States
Bellingham, WA: SPIE, 2009 (SPIE Proceedings 7201)
ISBN: 978-0-8194-7447-6
Paper 720117
Conference "Laser applications in microelectronic and optoelectronic manufacturing" <7, 2009, San Jose/Calif.>
Conference Paper
Fraunhofer IBMT ()

An integrated tool combining control and diagnostic for nanoprocessing of bio-compatible and biological materials and also allowing multiphoton large area laser scanning microscopy has been developed. The device is based on an customized inverted microscope integrating a motorized open x,y stage with a very high precision and repeatability, a piezoelectric z axe. A strong development in hardware and software has been made for the control of the process. Imaging of large area by images reconstruction using a high resolution CCD camera for the machining and perforation of biological materials and non-biological materials on scales in the sub-micrometer range is possible. This tool can also be used as a laser scanning microscope of a large area using a PMT detector. This multi-function compact device is of prime interest and can be considered as a novel tool for nanoprocessing in material science, nanobiotechnology, nanomedicine. Further progress in telecommunications, optics, electronics, biomaterials, medicine, and transport strongly depends on the availability of reliable and rapid processing techniques. Laser-based micro-nano technology holds great promises and the evolution will be dictated by the development of inexpensive yet precise processing tools that can develop and structure materials with a high degree of controllability, accuracy, and reduced residual damage. Applications in biomedicine include, for example, optoporation, cells nanodrilling, nanocutting transfection of cells, deactivation of cell organelles or investigation of cell dynamics but also potentially useful in material science for the manufacture of waveguides, gratings, micro fluidic devices, nanocontainers, data storage, nanolithography, nanomarking,...