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Highly efficient three-level blazed grating in the resonance domain

: Oliva, M.; Michaelis, D.; Benkenstein, T.; Dunkel, J.; Harzendorf, T.; Matthes, A.; Zeitner, U.D.


Optics Letters 35 (2010), No.16, pp.2774-2776
ISSN: 0146-9592
Journal Article
Fraunhofer IOF ()

We designed, fabricated, and characterized three-level transmission gratings in the resonance domain with reduced shadowing losses based on a three-wave interference mechanism. A new technological approach allows for fabrication of homogeneous and large area multilevel gratings without spurious artifacts. To our knowledge, the measured efficiency of 86% exhibits the largest value yet reported for a multilevel transmission grating in the resonance domain close to normal incidence.