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Roughness measurement of ultra precision surfaces using light scattering techniques and analysis

: Herffurth, T.; Schröder, S.; Trost, M.; Duparre, A.

Herffurth, T. ; Optical Society of America -OSA-, Washington/D.C.:
Optical Fabrication and Testing, OF&T 2010. CD-ROM : OSA Topical Meeting, Optical Fabrication and Testing (OF&T), 13.-17.6.2010, The Snow King Resort, Jackson Hole, Wyoming, USA
Washington, DC: OSA, 2010 (OSA Technical digest series)
ISBN: 978-1-55752-893-3
Paper OTuA5
Topical Meeting "Optical Fabrication and Testing" (OF&T) <2010, Jackson Hole/Wyo.>
Conference Paper
Fraunhofer IOF ()

Light scattering techniques are used as powerful method for roughness measurements. Recent achievements in characterizing even large and curved surfaces are presented.