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Nanoscale coatings

: Kaiser, N.; Bischoff, M.; Feigl, T.; Schulz, U.; Stenzel, O.

Optical Society of America -OSA-, Washington/D.C.:
Optical Interference Coatings 2010. CD-ROM : Topical meeting and tabletop exhibit, June 6-11, 2010, Tucson, Arizona, USA. Technical digest
Washington, DC: OSA, 2010
ISBN: 978-1-55752-891-9
Paper WA1
Optical Interference Coatings Topical Meeting and Tabletop Exhibit (OIC) <2010, Tucson/Ariz.>
Conference Paper
Fraunhofer IOF ()

Further progress on the manufacture of nanoscale coatings requires control of film-microstructure at the atomic level. Latest results from coatings for EUV- and DUV-lithography, coatings and nanostructures on plastics and balanced-properties coatings will be presented.