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Influence of substrate finish and thin film roughness on the optical performance of Mo/Si multilayers

: Trost, M.; Schröder, S.; Feigl, T.; Duparre, A.

Optical Society of America -OSA-, Washington/D.C.:
Optical Interference Coatings 2010. CD-ROM : Topical meeting and tabletop exhibit, June 6-11, 2010, Tucson, Arizona, USA. Technical digest
Washington, DC: OSA, 2010
ISBN: 978-1-55752-891-9
Paper MD4
Optical Interference Coatings Topical Meeting and Tabletop Exhibit (OIC) <2010, Tucson/Ariz.>
Conference Paper
Fraunhofer IOF ()

The angle resolved scattering of Mo/Si multilayers at 13.5 nm is analyzed to separate the influence of substrate finish and intrinsic thin film roughening on the optical properties of Mo/Si multilayers.