Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Influence of substrate finish and thin film roughness on the optical performance of Mo/Si multilayers
| Optical Society of America -OSA-, Washington/D.C.:
Optical Interference Coatings 2010. CD-ROM : Topical meeting and tabletop exhibit, June 6-11, 2010, Tucson, Arizona, USA. Technical digest
Washington, DC: OSA, 2010
ISBN: 978-1-55752-891-9
Paper MD4 |
| Optical Interference Coatings Topical Meeting and Tabletop Exhibit (OIC) <2010, Tucson/Ariz.> |
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| English |
| Conference Paper |
| Fraunhofer IOF () |
Abstract
The angle resolved scattering of Mo/Si multilayers at 13.5 nm is analyzed to separate the influence of substrate finish and intrinsic thin film roughening on the optical properties of Mo/Si multilayers.