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Ultra-precise optical components with machinable silicon layer

: Schürmann, M.; Jobst, P.-J.; Kaiser, N.; Kolbmüller, A.; Müller, S.; Gebhardt, A.; Risse, S.; Eberhardt, R.

Optical Society of America -OSA-, Washington/D.C.:
Optical Interference Coatings 2010. CD-ROM : Topical meeting and tabletop exhibit, June 6-11, 2010, Tucson, Arizona, USA. Technical digest
Washington, DC: OSA, 2010
ISBN: 978-1-55752-891-9
Paper PDWD15
Optical Interference Coatings Topical Meeting and Tabletop Exhibit (OIC) <2010, Tucson/Ariz.>
Conference Paper
Fraunhofer IOF ()

Several micron thick silicon films deposited by magnetron sputtering have a nearly amorphous structure. Optical elements coated with theses films can be machined, polished, and structured in order to achieve ultra-precise optical components.