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Optical measurement methods for MEMS applications
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1999
Book Article
Titel
Optical measurement methods for MEMS applications
Author(s)
Großer, V.
Bombach, C.
Faust, W.
Vogel, D.
Michel, B.
Hauptwerk
Materials mechanics, fracture mechanics, micro mechanics
Language
English
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Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM