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Nanoimprinted metallic probe demonstrators for electrical scanning probe microscopy: Manufacturing, characterization, and application

Poster at 14th European FIB Users Group Meeting (EFUG 2010), Gaeta, Italy
 
: Jambreck, J.D.; Yanev, V.; Schmitt, H.; Rommel, M.; Bauer, A.J.; Frey, L.

:
Poster urn:nbn:de:0011-n-1433295 (660 KByte PDF)
MD5 Fingerprint: 7bbbd728407564b05a63cb74a03e110d
Created on: 20.10.2010


2010, 1 Folie
European FIB Users Group Meeting (EFUG) <14, 2010, Gaeta/Italy>
English
Poster, Electronic Publication
Fraunhofer IISB ()
metal tip; nanoimprint lithography; scanning probe microscopy; FIB; TUNA; SCM; NIL; SPM; AFM; atomic force microscopy; scanning capacitance microscopy; focused ion beam

: http://publica.fraunhofer.de/documents/N-143329.html