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Laser ablation of antireflection coatings for plated contacts yielding solar cell efficiencies above 20 %

: Knorz, A.; Aleman, M.; Grohe, A.; Preu, R.; Glunz, S.W.

Fulltext urn:nbn:de:0011-n-1433215 (348 KByte PDF)
MD5 Fingerprint: d9975061d8332ff419defc0ef678bced
Created on: 31.8.2012

Sinke, W. ; WIP - Renewable Energies, München; European Commission; UNESCO; World Council for Renewable Energy; International Photovoltaic Equipment Association:
24th European Photovoltaic Solar Energy Conference 2009. CD-ROM : The compiled State-of-the-Art of PV Solar Technology and Deployment. Proceedings of the International Conference held in Hamburg, 21-25 September 2009
München, 2009
ISBN: 3-936338-25-6
European Photovoltaic Solar Energy Conference and Exhibition (EU PVSEC) <24, 2009, Hamburg>
Conference Paper, Electronic Publication
Fraunhofer ISE ()

To reduce shadowing losses and therefore gain higher short current densities JSC as well as to overcome contact resistance limitations a front side metallization based on laser ablation of the antireflection coating and plated contacts is proposed. In this paper we will present solar cells with efficiencies of up to 20.7 % featuring an industrially feasible shallow diffused 110 Ohm/sq. emitter and a plasma enhanced chemical vapour deposition (PECVD)-SiN antireflection coating. The main focus in this paper lies on the laser ablation process. The characteristics of ns- and ps-laser ablation regarding the influence on the emitter profile and the ablation pattern on a textured surface will be discussed.