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Wet-chemical pre-treatment of c-Si substrates enhancing the performance of a-Sic:H/c-Si heterojunction solar cells

: Becker, J.-P.; Pysch, D.; Leimenstoll, A.; Hermle, M.; Glunz, S.W.

Fulltext urn:nbn:de:0011-n-1427671 (223 KByte PDF)
MD5 Fingerprint: e2c55a7846b83cbc33459113ae4aefc4
Created on: 31.8.2012

Sinke, W. ; WIP - Renewable Energies, München; European Commission; UNESCO; World Council for Renewable Energy; International Photovoltaic Equipment Association:
24th European Photovoltaic Solar Energy Conference 2009. CD-ROM : The compiled State-of-the-Art of PV Solar Technology and Deployment. Proceedings of the International Conference held in Hamburg, 21-25 September 2009
München, 2009
ISBN: 3-936338-25-6
European Photovoltaic Solar Energy Conference and Exhibition (EU PVSEC) <24, 2009, Hamburg>
Conference Paper, Electronic Publication
Fraunhofer ISE ()

The properties of mono-crystalline silicon (c-Si) surfaces after different wet-chemical oxidation and etching steps are investigated regarding the microscopic roughness and electronic properties. For characterization spectral ellipsometry (SE) in the ultraviolet and visible spectral range and photoluminescence measurements (PL) were used. In addition the effect on the performance of a-SixC1-x:H(n)/c-Si(p) heterojunction solar cells were analyzed. A cleaning sequence consisting of an oxidation in hot deionized water and a subsequent etch-back of the thin oxide in ammonium fluoride (NH4F) was found to provide a smooth Si(111) surface with a low defect density compared to standard cleaning sequences. Incorporation of the cleaning sequence in the processing of amorphouscrystalline heterojunction solar cells on textured substrates leads to an increase in the open-circuit voltage as well as the pseudo fill factor.