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Combined in situ and ex situ optical data analysis of magnesium fluoride coatings deposited by plasma ion assisted deposition

: Wilbrandt, S.; Stenzel, O.; Bischoff, M.; Kaiser, N.


Applied optics 50 (2011), No.9, pp.C5-C10
ISSN: 0003-6935
ISSN: 1539-4522
ISSN: 1559-128X
Journal Article
Fraunhofer IOF ()

The combination of in situ spectrophotometry during film deposition and ex situ spectrophotometry allows insight into the depth distribution of optical losses in plasma ion assisted deposition coatings. An adapted optical characterization strategy for absorbing coatings using only in situ transmittance data has been developed and is exemplified in application to magnesium fluoride coatings. Measurements and simulation results strongly indicate an increased absorption caused by local understoichiometry of the fluoride material close to the fused silica substrate.