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Investigations on silicon thermal flow sensors with mesa structures

: Hariadi, I.; Trieu, H.-K.; Mokwa, W.; Vogt, H.

Saneistr, J. ; Czech Technical University, Prag:
Eurosensors XVI. Proceedings : The 16th European Conference on Solid-State Tranducers, September 15-18, 2002, Prague, Czech Republic
Praha, 2002
Eurosensors <16, 2002, Praha>
European Conference on Solid-State Transducers <16, 2002, Praha>
Conference Paper
Fraunhofer IMS ()
flow sensor; thermal time-of-flight; mesa structure; physical sensor

In this paper, the basic idea and the results of implementing thermal flow sensor with novel mesa structure are presented. One of the profound effects of the mesa structures on the characteristics of the flow sensor when it operates in TTOF mode is pointed out.