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Preparation and characterization of Cu'Me"'

: Polenzky, C.; Ortner, K.; Szyszka, B.

Kondruweit, S.; Szyszka, B.; Pütz, J. ; Fraunhofer-Institut für Schicht- und Oberflächentechnik -IST-, Braunschweig:
8th International Conference on Coatings on Glass and Plastics, ICCG 2010. Advanced Coatings for Large Area or High-Volume Products. Proceedings : June 13-17, 2010, Braunschweig, Germany
Braunschweig: IST, 2010
ISBN: 978-3-00-031387-5
International Conference on Coatings on Glass and Plastics (ICCG) <8, 2010, Braunschweig>
Conference Paper
Fraunhofer IST ()
transparent conductive oxide; p-type; CuAlO2; CuCrO2; sputtering

Transparent and conductive p-type oxide films are building blocks for the rising field of transparent oxide based electronics. Starting with the discovery of p-type conductivity in CuAlO2 in 1997, the subject of material optimization, device development and large area low temperature synthesis receives considerable interest. This paper addresses the PVD synthesis of CuAlO2 and CuCrO2 thin films by sputterig aiming towards low temperature processes being capable for low cost ceramic substrate materials.