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1987
Conference Paper
Titel
Self-aligned low-loss totally reflecting waveguide mirrors in InGaAsP/InP
Abstract
The authors report on the design, fabrication and performance of totally reflecting waveguide mirrors for a 90 degrees directional change of monomode rib waveguides in the InGaAsP/InP material system. The precise lateral position and angular orientation of the mirror relative to the waveguides is ensured to a high degree by employing a self-aligning method. Waveguide mirrors etched by RIE in a CH4/H2 plasma show an average loss of only 1.5 dB each for 4 and 8 devices in series.
Language
English
Tags
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gallium arsenide
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gallium compounds
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iii-v semiconductors
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indium compounds
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integrated optics
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mirrors
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optical losses
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optical waveguides
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methane-h2 plasma
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semiconductor
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design
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fabrication
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performance
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totally reflecting waveguide mirrors
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90 degrees directional change
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monomode rib waveguides
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1.5 db
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linbo3
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litao3
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linbo3