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Two- and three-dimensional micro- and sub-micrometer periodic structures using two-beam laser interference lithography

: Lasagni, A.F.; Menendez-Ormaza, B.S.


Advanced engineering materials 12 (2010), No.1-2, pp.54-60
ISSN: 1438-1656
ISSN: 1615-7508
Journal Article
Fraunhofer IWS ()

In this study, we present different approaches for the fabrication of two and three dimensional structures using two-beam interference lithog. The advantages of using more than one irradn. step for the fabrication of complex structures are theor. demonstrated by avoiding the introduction of line effects. For the fabrication of 3D structures, two alternatives are discussed including a layer by layer approach as well as a multidimensional (non-orthogonal) interference exposure setup. Finally, an example of biomimetic patterning is given. In all cases, numerical calcns. showed a good agreement with the exptl. results, being able to explain the shape of the fabricated structures.