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Thermal management in stacks of MATCH-X MOEMS

: Schindler-Saefkow, F.; Wittler, O.; May, D.; Schacht, R.; Großer, V.; Michel, B.

IEEE Computer Society, Test Technology Technical Council -TTTC-:
International Workshop on Thermal Investigation [i.e. Investigations] of ICs and Systems, THERMINIC 2003. Collection of papers : Aix-en-Provence, France, 24 - 26 September 2003
Grenoble: TIMA Laboratory, 2003
ISBN: 2-8481-3020-2
International Workshop on Thermal Investigations of ICs and Systems (THERMINIC) <9, 2003, Aix-en-Provence>
Conference Paper
Fraunhofer IZM ()