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1987
Conference Paper
Titel
Self-aligned waveguide mirrors for optical integration on InGaAsP/InP
Abstract
Totally reflecting mirrors for monomode rib waveguides in InGaAsP/InP were fabricated by reactive ion etching using a self-aligning technique. For eight mirrors in series an average excess loss of 1.5 dB per mirror was observed. The loss mechanisms are discussed.
Language
English
Tags
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gallium arsenide
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gallium compounds
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iii-v semiconductors
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indium compounds
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integrated optics
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mirrors
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optical losses
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optical waveguide components
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self-aligned waveguide mirrors
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oeics
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totally reflecting mirrors
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iii-v semiconductor
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optoelectronic integrated circuits
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optical communication systems
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optical integration
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monomode rib waveguides
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reactive ion etching
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loss mechanisms
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1.5 db
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InGaAsP-InP