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Near-UV LEDs for integrated InO-based ozone sensors

: Wang, C.Y.; Cimalla, V.; Kunzer, M.; Passow, T.; Pletschen, W.; Kappeler, O.; Wagner, J.; Ambacher, O.


Physica status solidi. C 7 (2010), No.7-8, pp.2177-2179
ISSN: 1610-1634
ISSN: 1610-1642
ISSN: 1862-6351
International Conference on Nitride Semiconductors (ICNS) <8, 2009, Jeju/Korea>
Journal Article, Conference Paper
Fraunhofer IAF ()
In(2)O(3) nanoparticles; gas sensor; LED

The paper reports on the integration of resistive gas sensors from indium oxide nanoparticles with near-ultraviolet light emitting diodes (LEDs) for miniaturized and highly sensitive ozone sensing. For the integrated sensor an LED with an optical power as low as 250 microW is sufficient. An optimum operational window of the LED wavelength is determined to be between 380-420 nm. Furthermore, two operational modes of the used LED (pulse and continuous modes) have been compared and it is found that the pulse mode is more suitable for real applications.