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Blazed Fresnel zone lenses approximated by discrete step profiles: Effects of fabrication errors

: Ferstl, M.; Kuhlow, B.; Pawlowski, E.

Denisyuk, Y.N. ; European Optical Society -EOS-; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Holographics International '92 : 23 - 29 July 1992, Imperial College of Science, Technology and Medicine, London, United Kingdom
Bellingham/Wash.: SPIE, 1993 (SPIE Proceedings Series 1732)
ISBN: 0-8194-0905-7
Conference "Holographics International" <1992, London>
Conference Paper
Fraunhofer HHI ()
computer-generated holography; electron beam lithography; etching; holographic optical elements; lenses; optical interconnections; optical workshop techniques; quartz; sputter etching; blazed fresnel zone lenses; zone plate lenses; free space interconnects; depth errors; diffractive optics; wet etching; rie; cgh; masks; electron beam patterning; discrete step profiles; effects of fabrication errors; quartz glass; microstructuring; alignment errors; diffraction efficiency; parasitic foci; discrete level approximation; 1.5 micron; sio2

Blazed Fresnel zone lenses for 1.5 mu m wavelength were fabricated in quartz glass by means of microstructuring technology. The blazed profile in each zone of the lenses was approximated by two, four, and eight discrete levels. The effects of fabrication errors, such as depth and alignment errors, on the diffraction efficiency of the different Fresnel zone lenses were investigated. Further the location and intensity of the parasitic foci appearing due to the discrete level approximation are calculated. Theoretical results along with experimental measurements are presented.