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1994
Journal Article
Titel
Antireflection-coated diffractive optical elements fabricated by thin-film deposition
Abstract
The use of thin-film deposition in the fabrication of antireflection- coated diffractive optical elements is discussed. The antireflection coatings for these diffractive elements are optimized on the basis of an angular spectrum approach and the method of characteristic matrices. A minimum reflectivity as low as 1*10-4 is realized using in situ controlled multilayers of TiO2 and SiO2. The blazed profile of the diffractive optical elements is approximated by a stepped profile with up to 32 phase levels. The highest measured diffraction efficiency for 32-level Fresnel zone lenses was 97%.
Tags
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antireflection coatings
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computer-generated holography
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holographic gratings
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integrated optics
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lenses
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sputter deposition
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sputtered coatings
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antireflection-coated diffractive optical elements
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thin-film deposition
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fabrication
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angular spectrum approach
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characteristic matrices
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reflectivity
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in situ controlled multilayers
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sio2
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tio2
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blazed profile
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stepped profile
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diffraction efficiency
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fresnel zone lenses
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97 percent