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Integrated planar Fresnel zone lenses for beam forming and coupling

: Pawlowski, E.

Karthe, W. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Nanofabrication technologies and device integration
Bellingham/Wash.: SPIE, 1994 (Europto series)
ISBN: 0-8194-1517-0
Conference on Nanofabrication Technologies and Device Integration <1994, Lindau>
International Symposium on Integrated Optics <1994, Lindau>
Conference Paper
Fraunhofer HHI ()
integrated optics; lenses; optical couplers; optical design techniques; optical fabrication; optical focusing; optical interconnections; silicon compounds; sputter deposition; integrated planar fresnel zone lenses; beam forming; beam coupling; waveguide coupling; light deflection; waveguide element focusing; flexible design; refractive cylindrical microlens; integrated planar fresnel zone lens; coupling efficiency; kinoform profile; multiphase steps; thin film deposition; siox-multilayers; microlens spot size; diffraction limited spot size; coupling tolerance analysis; integrated planar fresnel zone lens couplers; optical free space interconnects; SiO2-SiO-SiO2-Si; Si

A new integrated device for coupling light into waveguides or deflecting and focusing the light from waveguide elements is proposed. The device shows flexible design possibilities and compact dimensions. It consists of a combination of a refractive cylindrical microlens and an integrated planar Fresnel zone lens. High coupling efficiencies can be expected by approaching a kinoform profile with multiphase steps. The Fresnel zone lenses and the cylindrical microlenses were fabricated by thin film deposition of SiOx-multilayers. The measured spot-sizes of the fabricated microlenses are close to the diffraction limited values. A theoretical analysis of coupling tolerances indicates that integrated planar Fresnel zone lens couplers will be useful for optical free space interconnects.