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Synchronal pulsed RF superimposed DC sputtering of aluminium doped zinc oxide (ZnO:Al)

 
: Heimke, B.; Hartung, U.; Kopte, T.; Junghähnel, M.; Nyderle, R.

Kondruweit, S.; Szyszka, B.; Pütz, J. ; Fraunhofer-Institut für Schicht- und Oberflächentechnik -IST-, Braunschweig:
8th International Conference on Coatings on Glass and Plastics, ICCG 2010. Advanced Coatings for Large Area or High-Volume Products. Proceedings : June 13-17, 2010, Braunschweig, Germany
Braunschweig: IST, 2010
ISBN: 978-3-00-031387-5
pp.253-257
International Conference on Coatings on Glass and Plastics (ICCG) <8, 2010, Braunschweig>
English
Conference Paper
Fraunhofer FEP ()
RF superimposed; magnetron sputtering; transparent conductive oxide; aluminium-doped zinc oxide; electrical and optical properties

: http://publica.fraunhofer.de/documents/N-134115.html