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Properties of transparent conductive niobium doped titania (TNO) thin film deposited by large area DC and pulsed DC sputtering

 
: Junghähnel, M.; Heimke, B.; Hartung, U.; Kopte, T.; Zywitzki, O.

Kondruweit, S.; Szyszka, B.; Pütz, J. ; Fraunhofer-Institut für Schicht- und Oberflächentechnik -IST-, Braunschweig:
8th International Conference on Coatings on Glass and Plastics, ICCG 2010. Advanced Coatings for Large Area or High-Volume Products. Proceedings : June 13-17, 2010, Braunschweig, Germany
Braunschweig: IST, 2010
ISBN: 978-3-00-031387-5
pp.259-263
International Conference on Coatings on Glass and Plastics (ICCG) <8, 2010, Braunschweig>
English
Conference Paper
Fraunhofer FEP ()
transparent conductive oxide; titanium dioxide; niobium doped titania; sputtering

: http://publica.fraunhofer.de/documents/N-134114.html