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Integrated flow sensor with monocrystalline silicon membrane operating in Thermal Time-of-Flight mode

 
: Hariadi, I.; Trieu, H.-K.; Mokwa, W.; Vogt, H.

Saneistr, J. ; Czech Technical University, Prag:
Eurosensors XVI. Proceedings : The 16th European Conference on Solid-State Tranducers, September 15-18, 2002, Prague, Czech Republic
Praha, 2002
pp.715-716
Eurosensors <16, 2002, Praha>
European Conference on Solid-State Transducers <16, 2002, Praha>
English
Conference Paper
Fraunhofer IMS ()
flow sensor; thermal time-of-flight; thermal delay-line oscillator

Abstract
The silicon flow sensor presented in this paper operates in thermal time-of-flight (TTOF) mode. The sensors are fabricated on SOI wafers using CMOS compatible processes. Apart from single TTOF, the flow sensor can also operate in thermal delay-line oscillator (TDLO) mode.

: http://publica.fraunhofer.de/documents/N-134024.html