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2002
Conference Paper
Titel
Integrated flow sensor with monocrystalline silicon membrane operating in Thermal Time-of-Flight mode
Abstract
The silicon flow sensor presented in this paper operates in thermal time-of-flight (TTOF) mode. The sensors are fabricated on SOI wafers using CMOS compatible processes. Apart from single TTOF, the flow sensor can also operate in thermal delay-line oscillator (TDLO) mode.
Author(s)