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Dynamical investigation of a wrap-around gas bearing design in a vacuum environment

 
: Heidler, N.; Schenk, C.; Bauer, R.; Risse, S.; Scheiding, S.; Schubert, S.

Spaan, H. ; European Society for Precision Engineering and Nanotechnology -EUSPEN-:
10th International Conference of the European Society for Precision Engineering and Nanotechnology 2010. Proceedings. Vol.1 : May 31st - June 4th 2010, Delft, Netherlands
Bedford: Euspen, 2010
ISBN: 978-0-9553082-8-4
pp.400-403
European Society for Precision Engineering and Nanotechnology (International Conference) <10, 2010, Delft>
English
Conference Paper
Fraunhofer IOF ()

Abstract
Ultra precision positioning stages often use gas bearings to realize the sophisticated demands of positioning accuracy and repeatability which are required for tasks like wafer processing and inspection, e.g. for EUV lithography. One common method of realizing a linear guided structure with high stiffness is a wrap-around design of two or more thrust gas bearing pads. Since some of the processes have to be performed in a high vacuum environment, dynamic tests are carried out inside of a vacuum chamber. The influences of different input parameters (supply pressure, velocity) on the stability of the wrap-around design are investigated. The first results show that no self-excited vibrations occur at supply pressures up to 400 kPa and a maximum velocity of 80 mm/s.

: http://publica.fraunhofer.de/documents/N-134008.html