• English
  • Deutsch
  • Log In
    Password Login
    Research Outputs
    Fundings & Projects
    Researchers
    Institutes
    Statistics
Repository logo
Fraunhofer-Gesellschaft
  1. Home
  2. Fraunhofer-Gesellschaft
  3. Konferenzschrift
  4. Dynamical non-contact exhaustion pipe for vacuum compatible air guided stages
 
  • Details
  • Full
Options
2009
Conference Paper
Title

Dynamical non-contact exhaustion pipe for vacuum compatible air guided stages

Abstract
The exhaust tubes of high vacuum compatible gas bearing guides should interfere as little as possible with the guide while maintaining a flexible connection and a highly effective exhaustion rate. Within this paper, a novel exhaust system is described that implements these requirements. The major achievement is the realization of a noncontact sealing between two exhaust tubes slidable into one another. This setup is characterized at static and dynamic conditions. The number of seal stages and the clearance height are indentified as major impact factors on the leakage rate of the setup. It is concluded that the investigated approach is very suitable for the guides, allowing for an efficient exhaust and avoiding mechanical disturbing forces.
Author(s)
Heidler, N.
Schenk, C.
Harnisch, G.
Risse, S.
Schubert, G.
Eberhardt, R.
Tünnermann, A.
Mainwork
Twenty-fourth Annual Meeting of the American Society for Precision Engineering 2009. Proceedings. CD-ROM  
Conference
American Society for Precision Engineering (ASPE Annual Meeting) 2009  
Language
English
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF  
Keyword(s)
  • air-bearing-stage

  • vacuum enviroment

  • exhaustion

  • non-contact seal

  • Cookie settings
  • Imprint
  • Privacy policy
  • Api
  • Contact
© 2024