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Fabrication of polarization diversity heterodyne receiver PICs on InP: Status, challenges and perspectives

DOI: 10.1109/ICIPRM.1995.522152

	Institute of Electrical and Electronics Engineers -IEEE-; IEEE Microwave Theory and Techniques Society; Japan Society of Applied Physics -JSAP-: IPRM '95. Seventh International Conference on Indium Phosphide and Related Materials. Proceedings 1995 pp.353-356
	International Conference on Indium Phosphide and Related Materials (IPRM) <7, 1995, Hokkaido>

	English
	Conference Paper
	Fraunhofer HHI ()
	diversity reception; iii-v semiconductors; indium compounds; integrated optoelectronics; light polarisation; optical receivers; photodiodes; polarization diversity heterodyne receiver pic; fabrication; photonic integrated circuits; commercial production; generic integration concept; parallel fabrication; pic architectures; inp

Abstract
The results and experiences from the first fabrication of polarization diversity heterodyne receiver photonic integrated circuits (PICs) are reviewed and further improvements towards a possible commercial production in future are outlined. The fabrication process is based on a generic integration concept, which allows the parallel fabrication of not only heterodyne receiver PICs but also different other PIC architectures on the same wafer.