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1995
Conference Paper
Titel
Diffractive optical elements: Fabrication and measurement of wavelength division multiplexer
Abstract
A new type of wavelength division demultiplexer (DEMUX), which consists of a pair of diffractive optical elements integrated on one substrate, is presented. The 3 dB resolution of the DEMUX is about 2 nm and the measured losses are about -3.5 dB at 1.55 mu m wavelength. To simplify the fabrication process of the integrated diffractive optical elements, a new 3D structure replication technique is proposed.
Language
English
Tags
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antireflection coatings
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demultiplexing equipment
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diffraction gratings
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integrated optics
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light diffraction
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optical fabrication
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optical glass
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optical losses
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photolithography
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replica techniques
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sputter deposition
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wavelength division multiplexing
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diffractive optical elements
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wavelength division demultiplexer
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fabrication process
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3d structure replication technique
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thin film deposition
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ion beam sputter deposition
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fresnel zone lens
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quartz glass substrate
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integrated diffractive optical elements
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1.55 micron
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-3.5 db
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2 nm
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sio2