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Embossing of double-sided micro lens arrays in optical glass

: Schubert, A.; Edelmann, J.; Burkhardt, T.

Postprint urn:nbn:de:0011-n-1333101 (87 KByte PDF)
MD5 Fingerprint: 57241bc20ef0f55d98c4bcc7f42443e4
Created on: 29.3.2011

Spaan, H. ; European Society for Precision Engineering and Nanotechnology -EUSPEN-:
10th International Conference of the European Society for Precision Engineering and Nanotechnology 2010. Proceedings. Vol.2 : May 31st - June 4th 2010, Delft, Netherlands
Bedford: Euspen, 2010
ISBN: 978-0-9553082-8-4
European Society for Precision Engineering and Nanotechnology (International Conference) <10, 2010, Delft>
Conference Paper, Electronic Publication
Fraunhofer IWU ()
glass; glass forming; hot embossing; glass pressing; precision; glass moulding; microforming; replication; microfluidic; micro optic; MEMS; coating; Glas; Glasformgebung; Heißprägen; Blankpressen; Präzisionsblankpressen; Mikroumformung; Replikation; Mikrofluidik; Mikrooptik; Mikrosystemtechnik; Beschichtung

With the newly developed technology and hot embossing system presented, the manufacturing of double-sided precision optical lens arrays is possible. The new process offers interesting options to optical designers, for example for homogenization optics. The substitution of a classical condenser optic by a monolithic honeycomb condenser lens array leads to a noticeably shorter optical system and assembly operations are substantially reduced. With multiple lenslets on both sides of the array, an image field is illuminated homogeneously with high efficiency. Apart from the process development for a complete replication of the cavities and the correction of form deviations between mould and glass, it was necessary to develop a tool system for aligned double-sided hot embossing. Positioning and guidance principles had to be examined and means for a uniform tempering of the flat glass wafer as well as for securing a safe demoulding after hot embossing were investigated.