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Optical position feedback and phase control of MOEMS-scanner mirrors

: Tortschanoff, A.; Lenzhofer, M.; Frank, A.; Wildenhain, M.; Sandner, T.; Schenk, H.; Kenda, A.


Schenk, H. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
MOEMS and miniaturized systems IX : 25 - 27 January 2010, San Francisco, California, United States; at SPIE Photonics West
Bellingham, WA: SPIE, 2010 (Proceedings of SPIE 7594)
ISBN: 978-0-8194-7990-7
Paper 75940K
Conference "MOEMS and Miniaturized Systems" <9, 2010, San Francisco/Calif.>
Photonics West Conference <2010, San Franciso/Calif.>
Conference Paper
Fraunhofer IPMS ()

Resonantly driven oscillating MOEMS mirrors are used in various fields in optics, telecommunications and spectroscopy. One of the important challenges in this context is to assure stable resonant oscillation with well controlled amplitude under varying environmental conditions. For this reason, we developed a compact device comprising a resonant MOEMS micro-mirror, optical position sensing, and driver electronics, with closed loop control, which ensures operation close to the mirror resonance. In this contribution we present this device and show experimental results with a 23 kHz MOEMS mirror, which demonstrate its capabilities and limitations.