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1996
Conference Paper
Title
Polarization independent integrated mode transformer for uncladded InGaAsP/InP rib waveguides without epitaxial regrowth
Abstract
A polarization insensitive fibre port for integration in complex PICs has been demonstrated. The spot-size transformation is performed by a thickness taper integrated with an uncladded InGaAsP/InP rib waveguide in cooperation with guiding layers in the waveguide buffer. No epitaxial overgrowth is necessary to achieve polarization independent coupling. The thickness taper is structured by using shadow mask ion beam etching. The first fabricated integrated spot size transformers show a polarization independent coupling loss of 2.3+or-0.2 dB (butt coupled cleaved fibre). The radiation loss along the waveguide taper amounts to 0.6 dB. The -1 dB-alignment tolerances are larger than +or-2.4 mu m. A theoretical coupling loss of 1 dB is predicted for an optimized waveguide shape. The high yield fabrication process is suited for integration of the spot size transformer in complex PICs.
Language
English
Keyword(s)
gallium arsenide
iii-v semiconductors
indium compounds
integrated optics
optical couplers
optical fabrication
optical losses
rib waveguides
sputter etching
polarization independent integrated mode transformer
uncladded InGaAsP/InP rib waveguides
core thickness tapering
coupling loss
alignment tolerances
flat-end fibres
photonic ic
polarization insensitive fibre port
integration
spot-size transformation
thickness taper
guiding layers
waveguide buffer
polarization independent coupling
shadow mask ion beam etching
radiation loss
optimized waveguide shape
high yield fabrication process
2.1 to 2.5 db
0.6 db
InGaAsP-InP