Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Direct laser interference patterning

An overview on one-step fabrication of periodic arrays
: Lasagni, A.

VDI-Wissensforum GmbH:
Nanofair 2009. Proceedings. CD-ROM : 7th International Nanotechnology Symposium, New Ideas for Industry. May 26 - 27, 2009, Dresden, Germany
Düsseldorf: VDI Wissensforum, 2009
ISBN: 978-3-00-027076-5
15 pp.
International Nanotechnology Symposium (Nanofair) <7, 2009, Dresden>
Conference Paper
Fraunhofer IWS ()
Anwendbarkeit; dielektrische Eigenschaft; Imprinting-Technik; Laserinterferometrie; Lithographie; molekulares Prägen; Oberflächenbearbeitung; Oberflächenbeschaffenheit; Oberflächentopographie; Polyethylene-terephthalate (PET); Polymethylmethacrylat (PMMA); Polyimid

Surface pattering engineering techniques are essential to fabricate advanced topographies that can be use to modulate macroscopic properties on different materials. Particularly, Direct Laser Interference Patterning (DLIP) enables fabrication of repetitive periodic arrays and microstructures by irradiation of the sample surface with coherent beams of light. Furthermore, only one process step is required in comparison with other top-down or bottom-up techniques. In this study, we explore the possibilities of this technique to fabricate advanced architectures on several materials including dielectric polymers, conducting polymers as well as metals. The obtained results are compared in some cases with thermal simulations by finite element methods as well as classical models.