Mikrostrukturierung von Glas durch Heißprägen von beschichteten Glaswafern

The micro structuring of glass by hot forming processes is economically very interesting, particularly with the production of high quantities. Applications range from micro fluidics, optoelectronics and packaging up to the solar technology. To prevent adhering problems between glass and tool the glass substrate is coated with a thin film, in contrast to the tool coating used in conventional glass pressing. Thus an uncoupling of the viscosity in the volume and the sticking behaviour at the surface can be obtained, which opens an extended temperature range for the hot embossing of glass, and permits a forming at lower viscosities.