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Ultrafast, high-power waveguide fed photodetector with integrated spot size converter

: Trommer, D.; Schmidt, D.; Umbach, A.; Steingrüber, R.; Ebert, W.; Unterborsch, G.


IEEE Electron Devices Society:
International Conference on Indium Phosphide and Related Materials 2000. Conference proceedings : 14 - 18 May 2000, Williamsburg Marriott, Williamsburg, Virginia, USA
Piscataway, NJ: IEEE, 2000
ISBN: 0-7803-6320-5
ISBN: 0-7803-6321-3
ISBN: 0-7803-6322-1
International Conference on Indium Phosphide and Related Materials (IPRM) <12, 2000, Williamsburg/Va.>
Conference Paper
Fraunhofer HHI ()
high-speed optical techniques; integrated optics; optical waveguide components; photodetectors; high power waveguide; spot size converter; monolithic integration; ultrafast photodetector; shifting mask; taper ramp profile; responsivity; misalignment tolerance; fabrication

The monolithic integration of an ultrafast photodetector with an spot size transformer is presented. Using a shifting mask technique optimized taper ramp profiles are fabricated. The integrated devices exhibit a more than doubled responsivity (0.7 A/W) and about one magnitude higher misalignment tolerances compared to devices without spot size converters. The ultra large bandwith (f3dB>50 GHz) and the excellent high power behaviour is unimpaired by the integration of the spot size converter.