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ESD - the contribution to contamination control

 
: Matuscheck, P.

Cleanroom technology 6 (2000), No.5, pp.19
ISSN: 1365-5531
English
Journal Article
Fraunhofer IPA ()
contamination control; Kontaminationskontrolle; Electrostatic Discharge ESD; Kontamination

Abstract
Electrostatic discharge is an important contribution towards contamination control in the cleanroom environment. The author talks about the effect of ESD and the measures need to control the effects.

: http://publica.fraunhofer.de/documents/N-1292.html