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Modified phase retrieval algorithm for interferometric form testing in production machines

Modifizierter Phasen-Retrieval-Algorithmus für das interferometrische Formtesten in Fertigungsmaschinen
: Stürwald, S.; Vielhaber, K.; Schmitt, R.

Callaos, N. ; International Institute of Informatics and Systemics -IIIS-:
IMETI 2009, the 2nd International Multi-Conference on Engineering and Technological Innovation. Proceedings. Vol.3 : July 10 - 13, 2009 Orlando, Florida, USA
Winter Garden, Fla.: IIIS, 2009
ISBN: 1-934272-70-1
ISBN: 978-1-934272-70-1
International Multi-Conference on Engineering and Technological Innovation (IMETI) <2, 2009, Orlando/Fla.>
Conference Paper
Fraunhofer IPT ()

Form testing interferometry permits a fast, non-tactile and fullfield quantitative phase imaging of components in ultra precise manufacturing. To reduce the influence of vibrations under manufacturing conditions, it is most common to use the FT-based spatial carrier phase measurement technique (SCPM) which requires only a single interferogram recording. The utilization of a generalized, relatively new spatial phase-shifting method operating in the position space opens up prospects for reduced phase noise and less reconstruction errors of the calculated phase-map under production conditions. Therefore this phase-shifting technique is investigated for applicability in machine integrated interferometric form testing of optical lenses. A characterization of the algorithm and a comparison with the commonly used FT-based algorithm is performed.