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Processing of thin substrates by means of electrostatic carriers

 
: Landesberger, C.; Bollmann, D.; Bock, K.; Drost, A.; Schaber, U.

International Workshop on Thin Semiconductor Devices. Proceedings. CD-ROM
2005
International Workshop on Thin Semiconductor Devices <2005, Munich>
English
Conference Paper
Fraunhofer IZM ()

: http://publica.fraunhofer.de/documents/N-120536.html